A comprehensive nano-interpenetrating semiconducting photoresist toward all-photolithography organic electronics
نویسندگان
چکیده
منابع مشابه
Maskless photolithography: Embossed photoresist as its own optical element
This letter demonstrates that features embossed on the surface of a layer of photoresist can direct UV light in the photoresist layer. These topographical features act as optical elements: they focus/ disperse and phase shift incident light in the optical near field, inside the resist layer. A number of different surface topographies have been examined, which give 50–250 nm features after expos...
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ژورنال
عنوان ژورنال: Science Advances
سال: 2021
ISSN: 2375-2548
DOI: 10.1126/sciadv.abg0659